MEMS ultrasonic transducers for biomedical applications - ScienceDirect
SonicEdge MEMS Ultrasound Speaker-In-Chip: Next Gen MEMS for TWS Earbuds and Hearing Aids | audioXpress
Frontiers | A Review of UltraHigh Frequency Ultrasonic Transducers
TDK Chirp Microsystems CH-101 MEMS Ultrasonic ToF (Time of Flight) Range Finder Sensor - OnElectronTech
MEMS Sensors: TDK announces worldwide availability of MEMS-based “sonar on a silicon chip” ultrasonic time-of-flight sensors | Press Releases | News Center |TDK GLOBAL
A Look at Chirp's Range and Presence Sensing MEMS Time-of-Flight Ultrasonic Sensors - News
Development of high‐frequency‐type MEMS ultrasonic array sensor using P(VDF/TrFE) thin films - Tanaka - 2019 - Electronics and Communications in Japan - Wiley Online Library
MEMS-based ultrasonic transducer as the receiver for wireless power supply of the implantable microdevices - ScienceDirect
From Proof-of-concept to Product: Designs of a MEMS Sensor - IEEE Spectrum